PRODUCT > Horizontal Continuous Line

Horizontal Continuous Line

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画板 1 拷贝 21.png Product Introduction

品牌(2).png Since 2007, our continuous coating production line has been put on the market, and a variety of models have been launched according to the different needs of various industries, product structures, coating performance, and etc., and detailed classification design and construction are carried out according to the required performance characteristics of the products, so that the equipment can be conformed into a standardized model.
It carries the mission of the future development of the PVD coating industry. After nearly ten years of development, the equipment has reached the state of unmanned and standardized production. It is moving towards the development of intelligent production workshops, effectively improving product quality, reducing production costs, energy saving, and emission reduction. Enable companies to improve the core competitiveness of their products.


画板 1 拷贝 20.png Advantages and benefits


 1.png Flexible configuration to meet specific production needs;2.png adopt closed-loop controller to improve coating uniformity;3.png seamless docking operation improves productivity;4.png optimized magnetic configuration, with excellent uniformity and utilization;


画板 1 拷贝 22.png Technical indicators



Device Model

SP-0610AS

SP-1316AS

SP-2616AS

SP-3020AS

Vacuum Chamber Size (mm)

600×1000

1300×1600

2600×1600

3000×2000

Extreme Vacuum

6.0E-4Pa

Air Extraction Time

Ambient Pressure to 5.0E-3Pa in less than 20 mins

Pressure Rise Rate

1h≤0.5Pa

Vacuum Pump Set

Mechanical pump,Roots pump,Molecular pump,Maintaining Pump

Heating System

Room temperature to 300 ℃ (PID controlled)

Air lnjection System

Mass flow controller (1-6 set)

Targets

Arc Target, Pillar Sputtering Target, Linear lon Source, Plane Sputtering Target 

Power Supply

MF Sputtering Power Supply, Arc Power Supply, High Voltage Bombardment Bias Power Supply, DC Sputtering Power Supply, Radio Frequency Power Supplu

Workpiece Rotation Method

Horizontal Linear Movement

Operating Method

Manual+Semi-Automatic+Fully Automatic+PLC+IPC

Note

Specifications can be fully customized according to customer's product and recipe requirements



画板 1 拷贝 23.png application area