Since 2007, our continuous coating production line has been put on the market, and a variety of models have been launched according to the different needs of various industries, product structures, coating performance, and etc., and detailed classification design and construction are carried out according to the required performance characteristics of the products, so that the equipment can be conformed into a standardized model.
It carries the mission of the future development of the PVD coating industry. After nearly ten years of development, the equipment has reached the state of unmanned and standardized production. It is moving towards the development of intelligent production workshops, effectively improving product quality, reducing production costs, energy saving, and emission reduction. Enable companies to improve the core competitiveness of their products.
Advantages and benefits
Flexible configuration to meet specific production needs; adopt closed-loop controller to improve coating uniformity; seamless docking operation improves productivity; optimized magnetic configuration, with excellent uniformity and utilization;
Technical indicators
Device Model | SP-0610AS | SP-1316AS | SP-2616AS | SP-3020AS |
Vacuum Chamber Size (mm) | 600×1000 | 1300×1600 | 2600×1600 | 3000×2000 |
Extreme Vacuum | 6.0E-4Pa | |||
Air Extraction Time | Ambient Pressure to 5.0E-3Pa in less than 20 mins | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Mechanical pump,Roots pump,Molecular pump,Maintaining Pump | |||
Heating System | Room temperature to 300 ℃ (PID controlled) | |||
Air lnjection System | Mass flow controller (1-6 set) | |||
Targets | Arc Target, Pillar Sputtering Target, Linear lon Source, Plane Sputtering Target | |||
Power Supply | MF Sputtering Power Supply, Arc Power Supply, High Voltage Bombardment Bias Power Supply, DC Sputtering Power Supply, Radio Frequency Power Supplu | |||
Workpiece Rotation Method | Horizontal Linear Movement | |||
Operating Method | Manual+Semi-Automatic+Fully Automatic+PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirements |
application area