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PRODUCT > Functional coats coating equipment

Functional coats coating equipment

  • 功能性涂层镀膜设备
  • 功能性涂层镀膜设备
    • 1
画板 1 拷贝 21.png Product Introduction

品牌(2).png Equipment customized production, with flexible configuration, can integrate a variety of deposition methods, ion Arc, sputtering, HiPIMS, RF, and etc., to meet the needs of special coatings and new industry applications, and provide more for the development of new coatings and new materials’ possibility. The equipment has the characteristics of fast deposition rate, good film consistency, and pollution-free production process, so as to meet customer requirements for products. We have rich industry experience and provide customers with turnkey services to solve customer concerns.


画板 1 拷贝 20.png Advantages and benefits

 1.png The plasma density is very high;2.png Strong coating adhesion;3.png Under the microscope, the film layer is dense and free of pores;4.png High wear resistance;


画板 1 拷贝 22.png Technical indicators

Device Model

SP-0810ASI

SP-1112ASI

SP-1215ASI

SP-1512AI

Vacuum Chamber Size (mm)

800×1000

1100×1200

1200×1500

1500×1200

Maxium Vacuum

6.0E-4Pa

Air Extraction Time

Ambient Pressure to 5.0E-3Pa in less than 15 mins

Pressure Rise Rate

1h≤0.5Pa

Vacuum Pump Set

Mechanical pump,Roots pump,Molecular pump,Maintenance pump

Heating System

Room temperature to 500 ℃ (PID controlled)

Air lnjection System

Mass flow controller (1-4 set)

Targets

Cylindrical Target, Cloud Target, Sputtering Target,Gaseous lon Source, Evaporation Source

Power Supply

HiPIMS Power Supply, Arc Power Supply, High Voltage Bombardment bias Power Supply,SPA Power Supply, Radio Frequency Power supply, etc.

Workpiece Rotation Method

Public rotation+secondary rotation frequency conversion controllable and adjustable 1-5 revolutions per minute

Operating Method

Manual+Semi-Automatic+Fully Automatic+PLC+IPC

Note

Specifications can be fully customized according to customer's product and recipe requirements


画板 1 拷贝 23.png application area


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