Product Introduction
The equipment is equipped with multiple arc targets, sputtering targets, HiPIMS, etc. It can be coated separately with arc or magnetron sputtering, or it can take advantage of the advantages of both technologies to play a role in different stages of the coating process, such as using high-energy particles from the arc to bombard and clean the bottom layer at the initial stage of coating, in order to enhance the film/substrate bonding force; Subsequently, a medium frequency sputtering coating is used to obtain a delicate and smooth coating. This device can also be equipped with an ion source to meet the needs of multifunctional coating. It can complete single metal film and composite multi-layer film layers, suitable for the appearance needs of 3C digital products.
Advantages and benefits
Diversified sedimentation methods; Beautiful coating, delicate surface, wear-resistant and non fading; High productivity; Can deposit multiple material targets with high flexibility; Provide multi color process support and new color development.
Technical indicators
Device model | SP-1212ASI | SP-1512ASI | SP-1618ASI | SP-1912ASI |
Vacuum chamber size (mm) | 1200x1200 | 1500x1200 | 1600x1800 | 1900x1200 |
Coat Color | White Chrome, Gold Chrome,Champagne Gold,Rose Gold,Coffee Color,Gun Black,BLack,Etc. | |||
Maxium vacuum | 6.0E-4Pa | |||
Air Extraction Time | Ambient Pressure to 5.0E-Pa in less than 15 mins | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Mechanical pump,Roots pump,Molecular Pump.Maintaining Pump | |||
Heating System | Room temperature to 300℃ (PID controlled).heated by stainless steel heating tubes | |||
Air lnjection system | Mass flow controller (1-4 set) | |||
Targets | Circular Target,Pillar Taret,Plane Target,MF Twin Pillar Target,Linear lon Source | |||
Power Supply | MF Sputtering Power Supply,HiPIMS Power Supply,Arc Power Supply,High Voltage Bombardment Bias Power Supply.DC Sputtering Power Supply,lon Source Power | |||
Workpiece Rotation Method | Planetary Movement(1-5RPM) | |||
Operating Method | Manual+semi-Automatic+Fully Automatic+PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirements |
application area