Product Introduction
It is suitable for the preparation of anticorrosive coatings on the surface of magnetic materials, through magnetron sputtering, evaporation, electric arc, ion bombardment, and etc., rapid plating of aluminum/alloy, titanium, chromium and other metal films on the surface of the substrate can be achieved. The coat had high anticorrosion performance and film excellent binding force. There is no pollution in the production process, and the residue of electroplating solution leading to product defects can be avoided.
Advantages and benefits
Process technology support; Improve corrosion resistance; High productivity;
Technical indicators
Device Model | SP-1212AS | SP-1512AS | SP-1912AS | SP-1515AS |
Vacuum Chamber Size (mm) | 1200×1200 | 1500×1200 | 1900×1200 | 1500×1500 |
Maxium vacuum | 6.0E-4Pa | |||
Air Extraction time | Ambient Pressure to 5.0E-3Pa in less than 15 mins | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Mechanical Pump, Roots Pump,Molecular Pump,Maintaining Pump | |||
Heating System | Room temperature to 300℃ (PID controlled), heated by stainless steel heating tubes | |||
Air lnjection System | Mass flow controller (1-4 set) | |||
Target | Circular Target,Pillar Sputtering Taret,Linear lon Source | |||
Power Supply | MF Sputtering Power Supply, Arc Power Supply, High Voltage Bombardment Bias Power Supply, lon Source | |||
Workpiece Rotation Method | Planetary Movement(1-5RPM) | |||
Operating Method | Manual+Semi-Automatic+Fully Automatic +PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirements |
application area