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PRODUCT > Scientific Research Coating Equipment

Scientific Research Coating Equipment

  • 科研镀膜设备
  • 科研镀膜设备
    • 1

画板 1 拷贝 21.png Product Introduction

品牌(2).png Experimental vacuum coating equipment has the characteristics of beautiful appearance, compact structure, diverse performance, simple and reliable operation, and low power consumption. It can realize evaporation coating, magnetron sputtering coating, HiPIMS, RF, Arc coating, CVD, PECVD and other processes. It can be controlled manually, semi-automatically and fully automatically. There are many sizes and models to choose from.


画板 1 拷贝 20.png Advantages and benefits

 1.png Functions can be flexibly combined;2.png Customized production can be carried out in combination with users to meet experimental needs;3.png Diversified process programming;4.png Provide joint experimental development services.


画板 1 拷贝 22.png Technical indicators


Device Model

SP-0305AS

SP-0506AS

SP-0608ASI

SP-1005ASI

Vacuum Chamber Size (mm)

300×500

500×600

600×800

1000×500

Extreme Vacuum

6.0E-5Pa

Air Extraction Time

Ambient Pressure to 5.0E-3Pa in less than 10 mins

Pressure Rise Rate

1h≤0.5Pa

Vacuum Pump Set

Mechanical pump,Roots pump,Molecular pump,Maintaining pump

Heating System

Room temperature to 500℃ (PID controlled)

Air lnjection System

Mass flow controller (1-4 set)

Targets

lnductive coupled lonization,Elctric Beam Evaporation

Power Supply

lnductive Heating Power supply，Electric Gun Power Supply,MF Sputtering Power Supply, HiPIMS Power Supply, Arc Power Supply,Bias Power Supply, DC Sputtering Power Supply,Radio Frequency Power Supply

Workpiece Rotation Method

Revolution+rotation frequency conversion infinite speed regulation

Operating Method

Manual+Semi-Automatic+Fully Automatic+PLC+IPC

Note

Specifications can be fully customized according to customer's product and recipe requirements


画板 1 拷贝 23.png application area


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