Search
中文|English
中文|English
PRODUCT > Display coating equipment

Display coating equipment

  • 显示器镀膜设备
  • 显示器镀膜设备
    • 1
画板 1 拷贝 21.png Product Introduction

品牌(2).png This equipment integrated a variety of patented technologies and deposition coating methods, the implanted software controls the cathode trajectory, and deposits imaging display coatings. Covers the entire process of substrate cleaning, film deposition (including ultra-thin film) and patterning and etching. Pilot and production lines can be provided. The equipment is equipped with MES system interfaces. The coating process data can be transmitted to the MES system and automatically recorded in real time, which can be connected to realize a smart factory.


画板 1 拷贝 20.png Advantages and benefits

 1.png Multi-dimensional changes of the target source and ion source improve the uniformity and binding force of the polygonal film;2.png seamless docking operation improves productivity;3.png compatible with automatic loading and unloading industrial robots.


画板 1 拷贝 22.png Technical indicators


Device Model

SP-0909AS

SP-1212ASI

SP-1520ASI

SP-2616ASI

Vacuum Chamber Size (mm)

900×900

1200×1200

1500×2000

2600×1600

Maxium vacuum

6.0E-5Pa

Air Extraction Time

Ambient Pressure to 5.0E10-3Pa in less than 10 mins

Pressure Rise Rate

1h≤0.5Pa

Vacuum pump Set

Mechanical pump,Roots pump,Molecular pump,Maintaining Pump

Heating System

Room temperature to 300 ℃ (PID controlled)

Air lnjection System

Mass flow controller (1-8 set)

Targets

Arc Target,Sputtering Target, Radio Frequency Target, lon Source 

Power Supply

HiPIMS Power Supply, MF Sputtering Power Supply, Arc Power Supply, DC Sputtering Power Supply, Radio Frequency Power Supply, lon sourco Power supply, etc.

Workpiece Rotation Method

Revolution+rotation, linear variable frequency infinite speed regulation

Operating Method

Manual+Semi-Automatic+Fully Automatic+PLC+IPC

Note

Specifications can be fully customized according to customer's product and recipe requirements



画板 1 拷贝 23.png application area


prev： Hydrogen Energy Bipolar Plate Coating Equipment
next： Mini/Micro-LED display coating equipment
back