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PRODUCT > Mini/Micro-LED display coating equipment

Mini/Micro-LED display coating equipment

  • 薄膜电池导电涂层镀膜设备
  • 薄膜电池导电涂层镀膜设备
    • 1

画板 1 拷贝 21.png Product Introduction

品牌(2).png Glass substrate/display panel PVD coating production line. Through PVD coating technology, the glass substrate can be coated with copper on multiple sides.


画板 1 拷贝 20.png Advantages and benefits

 1.png Flexible configuration to meet specific production needs;2.png closed loop controlling logic for improved coating uniformity;3.png seamless operation for increased productivity;4.png optimized magnetic configuration for excellent uniformity and utilization;


画板 1 拷贝 22.png Technical indicators


Device ModelSP-0606SI-LHSP-1112S-LH
Vacuum Chamber Size (mm)9000×70015000×1100
Maximum Vacuum3.0E-4Pa
Pressure Rise Rate1h≤0.4Pa
Vacuum Pump SetMechanical pump,Roots pump,Molecular pump,Cryopump
Heating System
Room temperature to 300 ℃
Air lnjection SystemMass flow controller
Sputtering TargetRotating Cathode, Planar Sputtering Target,Polygonal Sputtering Target
Power SupplyDC Sputtering Power Supply, lon Power Supply
Workpiece Moving MethodStep(pass in one),Servo stepless speed regulation
control mode
Manual+semi-automatic+fully automatic integrated+PLC+IPC
Remote dockingMES
External AccesspriesAutomatic loading and unloading device



画板 1 拷贝 23.png application area


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