Product Introduction
Specially designed for cutting tools, alloy blades, gear tools, molds, and etc., the coating has high temperature hardness and wear resistance, necessary bending strength, impact toughness and chemical inertness, and good manufacturability (cutting, forging and heat treatment) Etc.), not easy to deform.
Advantages and benefits
High hardness; Wear resistance; High reliability;
Technical indicators
Device Model | SP-0506AI | SP-0810AI | SP-0910ASI | SP-1112AI |
Load Diameter (mm) | 350 | 600 | 650 | 900 |
Load Height (mm) | 420 | 750 | 800 | 1000 |
Maxium vacuum | 6.0E-4Pa | |||
Air Extraction Time | Ambient Pressure to 5.0E-3Pa in less than 20 mins | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Mechanical Pump, Roots Pump, Molecular Pump, Mainaining Pump | |||
Heating System | Room temperature to 550℃ (PID controlled) | |||
Air lnjection System | Mass flow controller (1-4 set) | |||
Targets | Cylindrical Target, Cloud Target, Sputtering Target,Gaseous lon Source | |||
Power Supply | HiPIMS Power Supply, Arc Power Supply, High Voltage Bombardment Bias Power Supply. SPA Power Supply,etc. | |||
Workpiece Rotation Method | Planetary Movement(1-5RPM) | |||
Maximum Load Weight(kg) | 250 | 500 | 500 | 1200 |
Operating Method | Manual+Semi-Sutomatic+Fully Automatic+PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirements |
Application Fields