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PRODUCT > DLC coating equipment

DLC coating equipment

  • DLC涂层镀膜设备
  • DLC涂层镀膜设备
    • 1

画板 1 拷贝 21.png Product Introduction

品牌(2).png DLC (Diamond Like Carbon Coating) coating equipment is widely used in engine parts, non-ferrous metal cutting tools, sliding seal parts, textile industry and other industrial fields.

This series of equipment is suitable for a variety of DLC coatings, and can be equipped with a combination of filtered arc ion plating, unbalanced magnetron sputtering, HiPIMS, PE-CVD, and etc. according to customer needs. It is suitable for automobile parts manufacturing, mechanical parts, molds, and bearings, punching dies, molds, aerospace parts, and etc.


画板 1 拷贝 20.png Advantages and benefits

 1.png Low friction coefficient;2.png Excellent adhesion;3.png Low temperature film-forming technology;


画板 1 拷贝 22.png Technical indicators


Device Model

SP-0506AI

SP-0810AI

SP-0910ASI

SP-1112AI

Load Diameter (mm)

350

600

650

900

Load Height (mm)

420

750

800

1000

Extreme vacuum

6.0E-5Pa

Air Extraction time

Ambient Pressure to 5.0E-3Pa in less than 20 mins

Pressure Rise Rate

1h≤0.5Pa

Vacuum Pump Set

Mechanical pump,Roots Pump,Molecular pump,Maintenance pump

Heating System

Room temperature to 550℃ （PID controlled)

Air lnjection System

Mass flow controller (1-4 set)

Targets

Cylindrical Target, Cloud Target, Sputtering Target, Gaseous lon Source

Power Supply

HiPIMS Power Supply, Arc Power Supply, High Voltage Bombardment Bias Power Supply, SPA Power Supply, lon Source Power Supply, etc.

Workpiece Rotation Method

Planetary Movement(1-5RPM)

Maximum Load Weight(kg)

250

500

500

1200

Operating Method

Manual+Semi-Automatic+Fully Automatic+PLC+IPC

Note

Specifications can be fully customized according to customer's produce and recipe requirements


画板 1 拷贝 23.png application area



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