Unipolar pulse bias power supply
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Product feature：The high-frequency inverter method has a wide range of application processes, which can effectively improve the quality of the film, reduce temperature rise, refine particles, increase adhesion, increase deposition rate, and improve film uniformity.
Power configuration：1. power supply: a 3m input power cord; 2. Optional configuration: a set of interlocking protection devices.
Advantages and benefits
Multi dimensional changes in target and ion sources to improve the uniformity and binding strength of the multilateral membrane layer;
Adopting a closed-loop controller to improve coating uniformity;
Seamless operation, improving productivity;
Technical indicators
Device model | SP6U1520 | SP12U1540 | SP20U1570 | SP30U15100 |
Power | 6KW | 12KW | 20KW | 30KW |
No-load voltage | 1000V | 1500V | 1500V | 1500V |
Operating voltage Operating current | A：50-300V 20A | A：50-300V 40A | A：50-300V 70A | A：50-300V 100A |
Duty cycle | 5%-90% | 5%-90% | 5%-90% | 5%-90% |
Frequency | 40kHz | 40kHz | 40kHz | 40kHz |
Size(mm) | 580×440×190 | 580×440×190 | 580×440×190 | 580×440×190 |
Cooling method | Water cooling | Water cooling | Water cooling | Water cooling |
Type | routine | routine | routine | routine |
Note | Special demand can be fully customized | |||
Fax：86-10-83865286
Postal Code：101102
Add：No. 35 Jingsheng South Second Street, Jinqiao Technology Industrial Base, Majuqiao Town, Tongzhou District, Beijing
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