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PRODUCT > DC magnetron sputtering power supply

DC magnetron sputtering power supply

    • 1
画板 1 拷贝 21.png Product Introduction

品牌(2).png Product feature：The high frequency inverter output mode is well matched with the sputtering target.

Power configuration：1. power supply: a 3m input power cord; 2. Optional configuration: a set of interlocking protection devices.



画板 1 拷贝 20.png Advantages and benefits

 1.png Multi dimensional changes in target and ion sources to improve the uniformity and binding strength of the multilateral membrane layer;2.png Adopting a closed-loop controller to improve coating uniformity;3.png Seamless operation, improving productivity;


画板 1 拷贝 22.png Technical indicators


Device Model

SP3M5

SP6M10

SP20M30

SP30M45

Power

3KW

6KW

20KW

30KW

No-load voltage

1200V

1200V

1200V

1200V

Operating voltage

200-600V

200-600V

200-600V

200-600V

Operating current

5A 

10A 

30A 

45A

Size(mm)

610×480×280

610×480×281

610×480×282

610×480×283

Cooling Method

Water cooling

Water cooling

Water cooling

Water cooling

Type

Normal

Normal

Normal

Normal

Note

Special demand can be fully customized



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