PRODUCT > MF AC magnetron sputtering power supply

MF AC magnetron sputtering power supply

画板 1 拷贝 21.png Product Introduction

品牌(2).pngProduct feature:The MF AC magnetron sputtering power supply can realize reasonable and rapid arc extinguishing function on the basis of fully satisfying the power supply; it has perfect protection and display functions such as undervoltage, overvoltage, overload and overheating; the power supply supports dual target operation, It can sputter non-conductive targets, increase ionization rate and effectively overcome target poisoning and abnormal discharge.

Power configuration:1. power supply: a 3m input power cord; 2. Optional configuration: a set of interlocking protection devices.

画板 1 拷贝 20.png Advantages and benefits


 1.png Multi dimensional changes in target and ion sources to improve the uniformity and binding strength of the multilateral membrane layer;2.png Adopting a closed-loop controller to improve coating uniformity;3.png Seamless operation, improving productivity;


画板 1 拷贝 22.png Technical indicators



Device model

SP20MB815

SP30MB830

SP40MB845

SP108MB1014

Power

20KW

30KW

40KW

108KW

No-load voltage

1000V

1000V

1000V

1500V

Operating Voltage

80-800V

80-800V 

80-800V

100-1000V

Operating current

15A

30A

45A

144A

Frequency

40kHz

40kHz

40kHz

40kHz

Size(mm)

610×480×280

610×480×280

750×480×310

800×600×1800

Cooling method

Water cooling

Water cooling

Water cooling

Water cooling

Type

Normal

Normal

Normal

Normal

Note

Special demand can be fully customized