Product feature:The MF AC magnetron sputtering power supply can realize reasonable and rapid arc extinguishing function on the basis of fully satisfying the power supply; it has perfect protection and display functions such as undervoltage, overvoltage, overload and overheating; the power supply supports dual target operation, It can sputter non-conductive targets, increase ionization rate and effectively overcome target poisoning and abnormal discharge.
Power configuration:1. power supply: a 3m input power cord; 2. Optional configuration: a set of interlocking protection devices.
Advantages and benefits
Multi dimensional changes in target and ion sources to improve the uniformity and binding strength of the multilateral membrane layer;
Adopting a closed-loop controller to improve coating uniformity;
Seamless operation, improving productivity;
Technical indicators
Device model | SP20MB815 | SP30MB830 | SP40MB845 | SP108MB1014 |
Power | 20KW | 30KW | 40KW | 108KW |
No-load voltage | 1000V | 1000V | 1000V | 1500V |
Operating Voltage | 80-800V | 80-800V | 80-800V | 100-1000V |
Operating current | 15A | 30A | 45A | 144A |
Frequency | 40kHz | 40kHz | 40kHz | 40kHz |
Size(mm) | 610×480×280 | 610×480×280 | 750×480×310 | 800×600×1800 |
Cooling method | Water cooling | Water cooling | Water cooling | Water cooling |
Type | Normal | Normal | Normal | Normal |
Note | Special demand can be fully customized |