PRODUCT > Coating equipment for transparent parts

Coating equipment for transparent parts

  • 透明件1.jpg

画板 1 拷贝 21.png Product Introduction


品牌(2).png It is applicable to the preparation of surface coatings for both organic glass and inorganic glass. ITO thin films and anti-reflective films can be deposited on the surface of the substrates, possessing good electrical conductivity and light transmittance.

The equipment can be equipped with systems such as direct current power supplies, intermediate frequency power supplies, radio frequency power supplies, ion power supplies, and High-Power Impulse Magnetron Sputtering (Hipims) systems. Customized combinations can be made according to users' technological applications to meet the needs of different users.

Due to the relatively poor heat resistance of organic glass, it is necessary to be equipped with specialized heating systems, such as infrared heaters or thermal radiation heaters. The temperature can be precisely controlled through the control system.

画板 1 拷贝 20.png Advantages and benefits


 1.png Excellent film layer uniformity2.png Conduct profiling motion according to the product structure3.png The performance of the film layer can be precisely controlled


画板 1 拷贝 22.png Technical indicators



Device ModelSP-1000SISP-1200SISP-1500SISP-1800SI
Vacuum Chamber Size (mm)1000×1000
1200×12001500×15001800×1800
Maxium vacuum5.0E-4Pa
Air Extraction timeAmbient Pressure to 5.0E-3Pa in less than 20mins
Pressure Rise Rate1h≤0.5Pa
Vacuum Pump SetDry screw pump + Oil-free Roots Pump + Magnetic levitation molecular pump
Heating SystemInfrared heaters with zoned temperature control. The temperature can be controlled and adjusted from room temperature to 400℃.
Air lnjection SystemMass flow controller(1-6 set)
TargetPlanar target、Pillar Sputtering Taret
Power SupplyMF Power Supply、DC Power Supply、RF Power Supply、Hipims
Workpiece Rotation MethodProfile-following motion/Reciprocating oscillation/Rotational motion linked with the target.
Operating MethodManual+Semi-Automatic+Fully Automatic+PLC+IPC
NoteSpecifications can be fully customized according to customer's product and recipe requirements



画板 1 拷贝 23.png Application area